| 摘要 |
To be able to detect a displacement amount of a moving object by a resolution of from micrometer to nanometer by a simple structure. An excitation coil 23 and a detection coil 25 are arranged to align and a magnetic body probe 27 in a conical shape a sectional area of which is change in a longitudinal direction is arranged in a state of being inserted into an air core portion of the excitation coil 23 . An output terminal from the detection coil 25 is connected to an amplifier 33 and a phase shifting circuit 35 is provided between the amplifier 33 and an input terminal of the excitation coil 23 . When the probe 27 of the magnetic body is moved at inside of the air core portion of the excitation coil 23, inductance of the excitation coil 23 is changed, a phase difference is produced between an input signal inputted to the excitation coil 23 and an output signal outputted from the detection coil 25 and the phase shifting circuit 35 changes a frequency to nullify the phase difference. The displacement amount is detected from the frequency deviation at this occasion.
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