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发明名称
ETCHING APPARATUS OF SEMICONDUCTOR FABRICATION PROCESS
摘要
申请公布号
KR20060020809(A)
申请公布日期
2006.03.07
申请号
KR20040069492
申请日期
2004.09.01
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
JOO, YOUNG SOO
分类号
H01L21/3065
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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