发明名称 Semiconductor device and method of manufacturing the same
摘要 A semiconductor device includes a p<SUP>-</SUP>-silicon substrate, n<SUP>-</SUP>-epitaxial growth layers on the p<SUP>-</SUP>-silicon substrate, a field insulating film at the surface of the n<SUP>-</SUP>-epitaxial growth layer, an npn transistor formed at the n<SUP>-</SUP>-epitaxial growth layer, an pnp transistor formed at the n<SUP>-</SUP>-epitaxial growth layer, a DMOS transistor on the n<SUP>-</SUP>-epitaxial growth layer, and a resistance. The DMOS transistor includes an n<SUP>+</SUP>-diffusion layer forming a source, a p-type diffusion layer forming a back gate region, a lightly doped n-type diffusion layer forming a drain, and a heavily doped n<SUP>+</SUP>-diffusion layer forming the drain.
申请公布号 US7009261(B2) 申请公布日期 2006.03.07
申请号 US20030732517 申请日期 2003.12.11
申请人 RENESAS TECHNOLOGY CORP. 发明人 NAKASHIMA TAKASHI
分类号 H01L21/28;H01L31/119;H01L21/336;H01L21/8249;H01L27/04;H01L27/06;H01L27/12;H01L29/06;H01L29/08;H01L29/10;H01L29/73;H01L29/732;H01L29/735;H01L29/78;H01L29/786 主分类号 H01L21/28
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