| 发明名称 |
Method and apparatus for depositing a homogeneous pyrolytic coating on substrates |
| 摘要 |
A method and apparatus for depositing a homogeneous pyrolytic coating on substrates. These coatings would include insulator, metal and semiconductor films on a glass substrate. The apparatus controls the size and distribution of the spray droplets to improve the uniformity of the coatings.
|
| 申请公布号 |
US7008481(B2) |
申请公布日期 |
2006.03.07 |
| 申请号 |
US20030429384 |
申请日期 |
2003.05.02 |
| 申请人 |
INNOVATIVE THIN FILMS, LTD. |
发明人 |
GIOLANDO DEAN M.;MCMASTER ALAN J. |
| 分类号 |
B05B7/00;B05B13/00;B05B15/04;B05C5/00;C03C17/00 |
主分类号 |
B05B7/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
