发明名称 Water jet-processing machine
摘要 A water jet-processing machine comprising a workpiece holding table for holding a workpiece, a nozzle for applying processing water to the workpiece held on the workpiece holding table, and a processing water supply means for supplying processing water containing abrasive grains to the nozzles, wherein the water jet-processing machine comprises a plurality of the nozzles and an interval adjusting means for adjusting an interval between adjacent nozzles.
申请公布号 US7008305(B2) 申请公布日期 2006.03.07
申请号 US20050056210 申请日期 2005.02.14
申请人 DISCO CORPORATION 发明人 SEKIYA KAZUMA
分类号 B24C3/00;B24C5/02;B24C1/04;B24C3/02;B24C3/32;B26F3/00;H01L21/301 主分类号 B24C3/00
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