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发明名称
APPARATUS FOR TRANSFERRING SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
KR20060020855(A)
申请公布日期
2006.03.07
申请号
KR20040069554
申请日期
2004.09.01
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
PARK, JAE IL;LEE, DUK WOO
分类号
H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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