发明名称 |
Micro-mirror and a method for fabricating the same |
摘要 |
A micro-mirror for deflecting an incident light is disclosed, wherein the micro-mirror comprises: a mirror section for reflecting an incident light issued from a laser diode; a hinge section including a fixed section and a movable section each having a flat surface; and a drive section having a bi-morph structure made of two or more of materials having different heat expansion coefficient for deflecting said mirror section to change relative angle to said incident light.
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申请公布号 |
US7009747(B2) |
申请公布日期 |
2006.03.07 |
申请号 |
US20020092711 |
申请日期 |
2002.03.07 |
申请人 |
SONY CORPORATION |
发明人 |
HARA MASAKI;MAKINO TAKUYA;HORI KAZUHITO;HANE KAZUHIRO;SASAKI MINORU |
分类号 |
G02B26/08;B81B3/00;B81C1/00;G02B26/10 |
主分类号 |
G02B26/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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