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经营范围
发明名称
Semiconductor Manufacturing Apparatus with Wafer Lifting Equipment
摘要
申请公布号
KR100558494(B1)
申请公布日期
2006.03.07
申请号
KR20040059976
申请日期
2004.07.29
申请人
发明人
分类号
H01L21/68;H01L21/205
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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