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发明名称
Spin coater used to manufacturing semiconductor, having rinse drain unit
摘要
申请公布号
KR100558479(B1)
申请公布日期
2006.03.07
申请号
KR20030034152
申请日期
2003.05.28
申请人
发明人
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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Befestigungsvorrichtung zur gegenseitigen Befestigung zweier Komponenten eines Möbelteils
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