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发明名称
Method of forming contact using silicon nano-wire in semiconductor device
摘要
申请公布号
KR100558037(B1)
申请公布日期
2006.03.07
申请号
KR20030002202
申请日期
2003.01.13
申请人
发明人
分类号
H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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