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发明名称
APPARATUS FOR GENERATING SOFT X-RAY USING HYBRID TARGET CONTAINING NANO-PHASE PARTICLE
摘要
申请公布号
KR100557754(B1)
申请公布日期
2006.03.06
申请号
KR20030065288
申请日期
2003.09.19
申请人
发明人
分类号
H01J35/02
主分类号
H01J35/02
代理机构
代理人
主权项
地址
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