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发明名称
TRENCH ISOLATION METHODS OF A SEMICONDUCTOR DEVICE
摘要
申请公布号
KR20060020516(A)
申请公布日期
2006.03.06
申请号
KR20040069363
申请日期
2004.08.31
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
JANG, HYUNG SOON
分类号
H01L21/76;H01L21/762
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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