APPARATUS FOR TEMPERATURE CONTROL OF SEMICONDUCTOR PROCESS CHAMBER,申请号KR20040068866-传众专利搜索

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发明名称	APPARATUS FOR TEMPERATURE CONTROL OF SEMICONDUCTOR PROCESS CHAMBER
摘要
申请公布号	KR20060020111(A)	申请公布日期	2006.03.06
申请号	KR20040068866	申请日期	2004.08.31
申请人	DONGBUANAM SEMICONDUCTOR INC.	发明人	PARK, SEI YOUNG
分类号	H01L21/18	主分类号	H01L21/18
代理机构		代理人
主权项
地址

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