Halbleiter-Beschleunigungsmesser und Verfahren zur Bewertung der Eigenschaften eines Halbleiter-Beschleunigungsmessers

摘要

A semiconductor accelerometer having a sensor element which includes a support frame, a silicon mass, flexures connected to the support frame and the silicon mass, semiconductor strain gauges formed on the flexures, and a staggered arrangement of diffusion resistors for adjusting any offset value variation. Aluminum wiring is connected to the strain gauges to form a Wheatstone bridge circuit, and a housing is provided to cover the sensor element.