SPUTTERING EQUIPMENT AND METHOD,申请号KR20030047002-传众专利搜索

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发明名称	SPUTTERING EQUIPMENT AND METHOD
摘要
申请公布号	KR100557992(B1)	申请公布日期	2006.03.06
申请号	KR20030047002	申请日期	2003.07.10
申请人		发明人
分类号	H01L21/203	主分类号	H01L21/203
代理机构		代理人
主权项
地址

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