摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric actuator which can prevent misoperation and can be driven stably. <P>SOLUTION: This piezoelectric actuator 1 has a vibrator 2, which has a reinforcing plate 21 and a piezoelectric element 22 stacked on the reinforcing plate 21 and is driven by applying an AC voltage to the piezoelectric element 22, a contact part 3 which is provided in the reinforcing plate 21 and contacts with a driven body R by the vibration of the vibrator 2, thereby transmitting driving force to the driven body R, driving electrodes 12 and 13 which apply AC voltage to the piezoelectric element 22, and detecting electrodes 11 and 14 which detect the voltage induced in the piezoelectric element 22 at the vibrating of the vibrator 2. The detection electrode 11 is connected to a ground. <P>COPYRIGHT: (C)2006,JPO&NCIPI |