THIN FILM SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD, ELECTRIC OPTICAL DEVICE, AND ELECTRONIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a thin film semiconductor device comprising a protective circuit element of superior reliability which constitutes a protective circuit for protecting an internal circuit well from a surge voltage and, even when the protective circuit has been broken down due to an excessive voltage, no failure is caused in a circuit operation.

SOLUTION: In the thin film semiconductor device provided with a base substance and a semiconductor film formed on the base substance, the internal circuit (main circuit part) 17 on the base substance, a protective circuit 18 and a terminal 19 are provided. The protective circuit 18 is provided with protective circuit elements 181 and 182 comprising a PIN diode having the semiconductor film and a floating electrode arranged while facing an I layer of the PIN diode with an insulating film between.

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