| 摘要 |
PROBLEM TO BE SOLVED: To provide a filtering system capable of realizing stable continuous operation of the system and exerting sufficient reliability while ensuring practical durability and life. SOLUTION: In the filtering system, a vacuum pipe valve 120 of an A vacuum pipe 119 is opened to reduce the pressure within an A filter unit 113 when the A filter unit 113 is washed reversely. If the vacuum pipe valve 120 is opened rapidly under high-pressure conditions, a high-pressure fluid flows at a stroke into a vacuum line 141, and the impact of the high-pressure fluid damages the vacuum line 141, a three-way valve 10, etc. and generates high noises. However, since a valve 9 for adjustment of the pressure-reducing rate is arranged in the vacuum line 141, the pressure-reducing process can be carried out in a prolonged time of several minutes, permitting avoidance of adverse effects of the impact of the high-pressure fluid and reduction of generation of high noises. COPYRIGHT: (C)2006,JPO&NCIPI
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