发明名称 Electronic device and method for fabricating the same
摘要 An electronic device includes: a lower interconnect formed to fill a recess of a first insulating film; a barrier film formed at least on the lower interconnect; and a second insulating film formed on the first insulating film and the barrier film. The first and second insulating films are bonded to each other.
申请公布号 US2006043589(A1) 申请公布日期 2006.03.02
申请号 US20050199158 申请日期 2005.08.09
申请人 IWASAKI AKIHISA 发明人 IWASAKI AKIHISA
分类号 H01L23/52 主分类号 H01L23/52
代理机构 代理人
主权项
地址