METHOD FOR FABRICATING SURFACE EMISSION LASER LIGHT SOURCE AND SURFACE EMISSION LASER LIGHT SOURCE

摘要

A surface emission laser light source (2) comprising a surface emission laser element (3) having a columnar mesa shape and a microlens (4) formed integrally on a substrate (10). The surface emission laser element (3) is a vertical resonator surface emission laser (VCSEL) where a resonator is constituted between a lower mirror (5) and an upper mirror (8). The microlens (4) consists of a first lens part (4a) and a second lens part (4b) and has a distributed refractive index structure where the refractive index varies, in a specified distribution, from the central part on the exit face (3a) side toward the outer lens face (4c). Consequently, a fabrication method of a surface emission laser light source capable of obtaining laser light under desired exit conditions and a surface emission laser light source are realized.