| 摘要 |
PROBLEM TO BE SOLVED: To provide a new structure and a new method for monitoring an operation of an acting integrated circuit in operation. SOLUTION: This invention relates to a method and a structure of an integrated circuit provided with a first transistor and an embeded carbon nanotube field effect transistor (CNT FET) which is adjacent to and smaller than the first transistor. The CNT FET is used for sensing a signal containing any of a temperature signal, a voltage signal, a current signal, an electric field signal and a magnetic field signal from the first transistor. Furthermore, the CNT FET is used for measuring a stress and a distortion in the integrated circuit containing any of a mechanical stress and a mechanical distortion as well as a thermal stress and a thermal distortion. Furthermore, the CNT FET is used for detecting a defective circuit in the integrated circuit. COPYRIGHT: (C)2006,JPO&NCIPI |
