发明名称 Machine tool control methods and designs for fabricating mesoscopic surface structures on substrates
摘要 There is provided a machining tool for machining a workpiece on a workpiece support in response to control signals. The machining tool includes a cutting tool configured to cut a surface of the workpiece. The machining tool also includes a first displacement mechanism and a second displacement mechanism. The first displacement mechanism arranged to displace the cutting tool relative to the workpiece in a first set of coordinates in response to the control signals. The second displacement mechanism supported by the first translation mechanism and arranged to displace the cutting tool relative to the workpiece in a second set of coordinates, the second displacement mechanism capable of a higher frequency response than the first displacement mechanism. The machining tool also includes a controller configured to receive the control signals and synchronize the displacement of the cutting tool due to the first displacement mechanism with the displacement of the cutting tool due to the second displacement mechanism.
申请公布号 US2006047358(A1) 申请公布日期 2006.03.02
申请号 US20040932239 申请日期 2004.08.31
申请人 GENERAL ELECTRIC COMPANY 发明人 LIANG ERWIN W.;OLCZAK EUGENE G.;SMOLENSKI JOSEPH L.;TANPITUKPONGSE TEEPORN P.;ROBRIGADO ERIC R.
分类号 G06F19/00 主分类号 G06F19/00
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