| 摘要 |
The object is to suppress penetration of dust and foreign particles into a nozzle of an ink jet recording head, and to manufacture and make functional a structure therefor in an economic manner and with high reliability. An ink discharge energy generating element which generates energy for discharging ink is formed on the surface of an Si substrate. The Si substrate comprises an ink supply port which communicates ink from the rear face side of the substrate to the front face side of the substrate. The ink supply port comprises a filter structure having a plurality of minute through holes formed on the Si substrate.
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