| 发明名称 |
Load port with manual FOUP door opening mechanism |
| 摘要 |
A load port comprises a platform for receiving a FOUP. The platform includes features for manually removing a FOUP door. The platform also includes features for placing the FOUP in operative relation to a wafer transfer robot configured to transfer wafers between first and second containers.
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| 申请公布号 |
US2006045663(A1) |
申请公布日期 |
2006.03.02 |
| 申请号 |
US20040912299 |
申请日期 |
2004.08.05 |
| 申请人 |
AGGARWAL RAVINDER;KUSBEL JAMES |
发明人 |
AGGARWAL RAVINDER;KUSBEL JAMES |
| 分类号 |
H01L21/677 |
主分类号 |
H01L21/677 |
| 代理机构 |
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代理人 |
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| 主权项 |
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