| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem wherein since conventionally a state of an alignment layer is judged after the alignment layer is formed on a substrate, the entire substrate with the layer has to be discarded if the alignment layer is defective to wastes materials. SOLUTION: After a group of ink jets 2 is judged for the state of nozzles in an inspection area 3, the group is moved to a film forming area 5 to form a film. This prevents wasting of a substrate. COPYRIGHT: (C)2006,JPO&NCIPI
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