发明名称 Flash cell structures and methods of formation
摘要 Methods of fabrication and flash memory structures eliminate process steps while increasing capacitive coupling between floating gates and control gates of the memory cells. A thick floating gate is deposited early in the process, and a height and width of the floating gate is controlled with deposition and etching or the use of spacers.
申请公布号 US2006046402(A1) 申请公布日期 2006.03.02
申请号 US20040930323 申请日期 2004.08.31
申请人 MICRON TECHNOLOGY, INC. 发明人 LI DI;CHEN CHUN;WOLSTENHOLME GRAHAM;SANDHU SUKESH;ZHOU XIANFENG
分类号 H01L21/336 主分类号 H01L21/336
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