DEVICE AND METHOD FOR AUTOMATIC FOCUSING OF ELECTRON OPTICS SYSTEM FOR SCANNING ELECTRON MICROSCOPE,申请号JP19960241903-传众专利搜索

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发明名称	DEVICE AND METHOD FOR AUTOMATIC FOCUSING OF ELECTRON OPTICS SYSTEM FOR SCANNING ELECTRON MICROSCOPE
摘要
申请公布号	JPH1092354(A)	申请公布日期	1998.04.10
申请号	JP19960241903	申请日期	1996.09.12
申请人	TOSHIBA CORP	发明人	NAKAI HIROAKI
分类号	H01J37/22;H01J37/04;H01J37/21;(IPC1-7):H01J37/04	主分类号	H01J37/22
代理机构		代理人
主权项
地址

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