发明名称 Low resistance peripheral local interconnect contacts with selective wet strip of titanium
摘要 Methods for forming memory devices and integrated circuitry, for example, DRAM circuitry, structures and devices resulting from such methods, and systems that incorporate the devices are provided.
申请公布号 US2006046398(A1) 申请公布日期 2006.03.02
申请号 US20040932327 申请日期 2004.09.01
申请人 MICRON TECHNOLOGY, INC. 发明人 MCDANIEL TERRENCE;TAGG SANDRA;FISHBURN FRED
分类号 H01L21/336;H01L21/8238;H01L21/8242 主分类号 H01L21/336
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