DEVICE FOR INTRODUCING PRECURSORS INTO AN ENCLOSURE, IN A PULSED MODE WITH MEASUREMENT AND CONTROL OF THE FLOW RATE

摘要

The invention relates to a device (1) for introducing at least one precursor into an enclosure, said device comprising at least one reservoir (2) containing the precursor, means for maintaining the reservoir (2) at a higher pressure than that of the enclosure, and at least one injector (3) connected to the reservoir (2). Said introduction device also comprises a device which is used to measure the average flow rate (6) and is arranged between the reservoir (2) and the injector (3), and a mechanical low-pass filter (7) arranged between the flow rate measuring device (6) and the injector (3). The control circuit (4) comprises outlets which are respectively connected to the reservoir (2) and to the injector (3) for controlling the pressure P and/or the injection time F