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发明名称
VERFAHREN UND APPARAT ZUR HERSTELLUNG VON EINGEBETTETEN INTEGRIERTEN FLACHSPEICHERN
摘要
申请公布号
DE60023247(D1)
申请公布日期
2006.03.02
申请号
DE2000623247
申请日期
2000.05.24
申请人
KONINKLIJKE PHILIPS ELECTRONICS N.V., EINDHOVEN
发明人
CUNNINGHAM, A.;BLANCHARD, A.
分类号
H01L21/8247;G11C16/04;H01L21/28;H01L27/115;H01L29/423;H01L29/788;H01L29/792
主分类号
H01L21/8247
代理机构
代理人
主权项
地址
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