| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection chip, capable of easily arranging fine particles having different probes fixed thereto in a predetermined order with few number of processes, its manufacturing method and an inspection method that uses the inspection chip. SOLUTION: The inspection plate has a substrate 10 having a recess 11 and a lid 70, and the space 50 surrounded by the recess 11 and the lid 70 is formed. Fine particles 31, 32, 33 and 34 are arranged in the space 50. A plurality of position control parts 20, 21, 22 and 23 are arranged in the space 50, and position control mean parts 12a, 12b, 12c and 12d are arranged so as to leave control intervals W1, W2, W3 and W4 having smaller than the diameter dimensions D1, D2, D3 and D4 of the fine particles 31, 32, 33 and 34, and the fine particles 31, 32, 33 and 34 are position controlled by the position control mean parts 12a, 12b, 12c and 12d. COPYRIGHT: (C)2006,JPO&NCIPI
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