发明名称 Apparatus for measuring optical properties of tested optical system using interference
摘要 A measuring apparatus for measuring the optical properties of an optical system including a mask with a slit and a window, upon which different light beams are focused to derive an interference pattern. The interference pattern can be used to obtain optical properties of the optical system.
申请公布号 US2006044569(A1) 申请公布日期 2006.03.02
申请号 US20050204439 申请日期 2005.08.15
申请人 CANON KABUSHIKI KAISHA 发明人 KATO SEIMA
分类号 G01B11/02 主分类号 G01B11/02
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