发明名称 |
Method and apparatus for registration with integral alignment optics |
摘要 |
A method and apparatus for front to back substrate registration is described. Alignment characteristics of features on surfaces of substrates can be used to physically align substrates with a multiplicity of integrated alignment optics. Measurement of offsets of the integral alignment optics are used to compute registration data for use in calibration of the substrate global alignment.
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申请公布号 |
US2006042106(A1) |
申请公布日期 |
2006.03.02 |
申请号 |
US20040925745 |
申请日期 |
2004.08.24 |
申请人 |
SMITH ADLAI H;HUNTER ROBERT O JR;MCARTHUR BRUCE B;KHUU THOMAS K;YAMAGUCHI YUJI |
发明人 |
SMITH ADLAI H.;HUNTER ROBERT O.JR.;MCARTHUR BRUCE B.;KHUU THOMAS K.;YAMAGUCHI YUJI |
分类号 |
G01C15/00 |
主分类号 |
G01C15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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