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发明名称
摘要
申请公布号	JP2752645(B2)	申请公布日期	1998.05.18
申请号	JP19880217927	申请日期	1988.08.31
申请人	KYUSHU NIPPON DENKI KK	发明人	SUGIURA KEIICHI
分类号	G06K9/20;G06T1/00;H01L21/02;(IPC1-7):H01L21/02	主分类号	G06K9/20
代理机构		代理人
主权项
地址

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