Substlate, electro-optical device, electronic apparatus, method of forming substlate, method of forming electro-optical device, and method of forming electronic apparatus

摘要

A contact structure, including: a first conductive layer; a insulating layer formed on the first conductive layer; a second conductive layer formed on the insulating layer; and a columnar structure, buried in a direction of film thickness in the insulating layer, electrically connecting the first conductive layer and the second conductive layer; wherein a reinforcement material is adhered to a vicinity of a root of the columnar structure.