An oscillatory rate sensor is described for sensing rotation about the "z-axis". It is tuning-fork in nature with structural linkages and dynamics such that fundamental anti-phase oscillation of two proof masses is accomplished by virtue of the mechanical linkages.
申请公布号
WO2005031257(A3)
申请公布日期
2006.03.02
申请号
WO2004US30614
申请日期
2004.09.20
申请人
KIONIX, INC.;CHOJNACKI, ERIC, P.;SHEN-EPSTEIN, JUNE, P.;NENADIC, NENAD;STIRLING, NATHAN, L.;NISTOR, VASILE
发明人
CHOJNACKI, ERIC, P.;SHEN-EPSTEIN, JUNE, P.;NENADIC, NENAD;STIRLING, NATHAN, L.;NISTOR, VASILE
