| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device comprising a shield layer capable of reducing the drop of the inductance of a spiral inductor. SOLUTION: The semiconductor device comprises a semiconductor substrate where an electronic circuit formed of semiconductor elements is formed, a spiral inductor formed on the semiconductor substrate, and a shield layer which is formed between the semiconductor substrate and the spiral inductor and has a plurality of openings formed radially from the center to the outer edge. COPYRIGHT: (C)2006,JPO&NCIPI
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