| 摘要 |
PROBLEM TO BE SOLVED: To provide a new working method for improving accuracy for working the outline of oscillator when forming the oscillator from the base material of piezoelectric single crystal. SOLUTION: The base material composed of piezoelectric single crystal is irradiated with laser light, the molecules of base material are dissociated and evaporated by photochemical reaction and by performing working for removing the base material matching to the shape of oscillator, the oscillator is formed. It is preferable that the oscillator is an oscillator for rotating angular velocity sensor, the driving oscillation and detecting oscillation of oscillator are performed within a prescribed plane and the piezoelectric single crystal is selected out of a group of crystal, lithium niobate, lithium tantalate, lithium niobate/lithium tantalate solid solution and langasite [phonetic]. |
