APPARATUS FOR MEASURING ELECTRICAL CHARACTERISTICS OF SEMICONDUCTOR

摘要

An apparatus is provided with a light irradiating means for applying light on a semiconductor whose characteristics are to be measured, an alternating current voltage source, a potential measuring means and an impedance regulator. To have a zero potential at a potential measuring point of the semiconductor to be measured in a status where the semiconductor is not irradiated with light by the light irradiating means, the impedance is regulated by the impedance regulator. The electrical characteristics of the semiconductor to be measured is measured by potential measurement at the time when the semiconductor is irradiated with light and at the time when the semiconductor is not irradiated with light. Thus, the electrical characteristics of the semiconductor can be accurately measured with a simple constitution.