| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a microlens which is easily manufactured and whose manufacturing precision and positional accuracy are high, and to provide the manufacturing method of the microlens. <P>SOLUTION: A photosensitive resin 2 is exposed by using a low gradation gray scale mask 3 and a photosensitive resin layer 2a having a flat part on its top part is formed. Thereafter, the photosensitive resin layer 2a is coated with a thermosetting resin 5 by spraying and is heated. According to the effect of surface tension, the central part of the thermosetting resin 5 is swelled out and is cured into a spherical shape on the top part to form the spherical microlens 10. Since the microlens 10 can be formed by using the low gradation gray scale mask, the manufacturing cost of the microlens can be reduced. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
