| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical characteristic measuring apparatus for preventing the position controllability of a table from being reduced and suppressing the influence of heat on peripheral members. <P>SOLUTION: The optical characteristic measuring apparatus 28 is provided with a first part 28A mounted on a table WTB, and including an objective optical system 94 on which light through an optical system to be checked is made incident; and a second part mounted on a mobile body 30 connected to the table WTB so as to be relatively moved, and including detector 95 for detecting light through the objective optical system. Consequently, the weight of the table on which the first part 28A is mounted is not increased and the table can be driven according to the comparatively heavy second part. Since the second part can be mounted on the second mobile object separately from the optical system to be checked, a state that heating of the second part may cause atmospheric air fluctuation around the optical system to be checked can be suppressed. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
