发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor device where an operation margin of an SRAM cell can widely be secured and software error resistance can be improved, and to provide a manufacturing method of the device. <P>SOLUTION: An element separation insulating film 2 is formed on a p-type Si substrate 1, and an n-type buried layer 20 is formed in an N-LV region of an SRAM cell region. A p-well and an n-well are formed. At the time of forming a channel doped layer, ions are implanted in the N-LV region of the SRAM cell region in parallel to the ion implantation of N-LV in a logic circuit region. The ions are also implanted in the N-LV region of the SRAM cell region in parallel to the ion implantation to the N-MV of an an I/O region. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006059880(A) 申请公布日期 2006.03.02
申请号 JP20040237696 申请日期 2004.08.17
申请人 FUJITSU LTD 发明人 TSUTSUMI TOMOHIKO;ANEZAKI TORU;KOJIMA HIDEYUKI;EMA TAIJI
分类号 H01L27/11;H01L21/8244;H01L21/8247;H01L27/10;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L27/11
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