| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer carrying device which can prevent a wafer from being broken by a fall in such a way that release preventing equipment is provided to the wafer carrying device used for storing and carrying a wafer during wafer conveyance in a semiconductor manufacturing line. SOLUTION: The device comprises a main body 100, in which a plurality of wafer inserting groove are formed in an internal side surface, and an opening is formed in a front surface so that a wafer 102 can enter/exit, release preventing equipment 120 for opening/closing the inserting groove in such a way that it is mounted in a front surface of the body 100 so that it can move perpendicularly, and that a relative location to the inserting groove may differ, and a means 130 connected with the release preventing equipment 120 for changing a relative location of the release preventing equipment 120 with respect to the inserting groove. COPYRIGHT: (C)2006,JPO&NCIPI |
