| 摘要 |
PROBLEM TO BE SOLVED: To provide a stopping method of a positioning device, and a positioning device capable of inhibiting the intrusion of foreign matters into a processing chamber from the external. SOLUTION: In maintenance, the exhausting of the processing chamber P is stopped first, then an inert gas such as a nitrogen gas is introduced into the processing chamber P from an introduction port not shown in Figure, and a pressure is increased to a degree of 1000Pa (specific internal pressure). Then a valve V0 is closed. Before the specific internal pressure is applied to the processing chamber P, the intrusion of outside foreign matters into the processing chamber P can be inhibited by exhausting the air from a differential pressure chamber 151 of a first differential exhaust seal. After the specific internal pressure is applied to the processing chamber P, the probability of intrusion of outside foreign matters into the processing chamber P is lowered even when the exhausting of the differential pressure chamber 151 of the first differential exhaust seal 151 is interrupted, thus the processing can be properly performed in the processing chamber P after the termination of maintenance. COPYRIGHT: (C)2006,JPO&NCIPI
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