| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film production apparatus having a further peeling prevention effect in the rounded part of the edge face. SOLUTION: The thin film production apparatus is constituted in such a way that grooves are formed in the inner wall of the thin film production apparatus and/or on the surface of a base material of an internal member, and a sprayed coating or blasting treatment is applied to the surface of the base material. COPYRIGHT: (C)2006,JPO&NCIPI
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