| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic electrode member having improved strength and enhanced long life, and capable of obtaining an excellent discharge characteristic when used as a trigger electrode such as a high frequency discharge-excited laser. SOLUTION: An elongated hole 7 is formed in a substantially columnar body 1 made of ceramic in parallel with the longitudinal axis direction S of the body 1, the tip part of the elongated hole 7 is closed by the ceramic, and a columnar electrode 5 made of a metal solder material is fitted into the hole 7 through a metallized layer 6 formed over the inner surface of the hole 7, whereby the columnar electrode 5 made of the metal solder material is deposited. COPYRIGHT: (C)2006,JPO&NCIPI |
