Integrated simulation fabrication and characterization of micro and nano optical elements

摘要

The invention is directed to a method for fabricating a micro or nano structure such as an optical waveguide incorporating an emitting surface in the form of a lens. The structure is fabricated on the basis of a theoretical simulation of the structure, with the parameters of the structure being characterized by geometric and light profiling using near-field and far-field monitoring. The results of the characterizing are compared iteratively with the simulation during fabrication.