| 摘要 |
PROBLEM TO BE SOLVED: To provide an electronic element and its manufacturing method wherein satisfactory reliability and electronic element characteristics are ensured, and a fine pattern can be formed inexpensively and easily, and to provide a display device and an arithmetic operation unit both equipped with the electronic element. SOLUTION: The electronic element involves a polyimide material as an insulating material, wherein an imidization ratio of the polyimide material is≥80% and dicarboxylic acid anhydride remaining in the polyimide material is≤3%. The manufacturing method manufactures the electronic element including an insulating layer containing the insulating material as the polyimide material. In the method, the polyimide material is used, the insulating layer is formed by applying and heating a precursor of the polyimide material, and the heating is performed under a low humidity environment of the humidity of≤1%. Further, the display device and the arithmetic operation unit employ the foregoing electronic element. COPYRIGHT: (C)2006,JPO&NCIPI
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