| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam generation and acceleration device capable of separating a high voltage part, shielding X rays at an ion acceleration part, and easily maintaining a plasma generation part. SOLUTION: The charged particle beam generation and acceleration device comprises a plasma generation means 1; a charged particle beam draw-out means 2 arranged at an outlet side of the plasma generation means; a charged particle beam acceleration means 3 arranged at a downstream side of the charged particle draw-out means 2; a guiding means 10 guiding current, voltage, gas or the like necessary for plasma generation to the plasma generation means 1; and a grounding cover formed so as to cover a high voltage part composed of the plasma generation means 1, the charged particle draw-out means 2, the charged particle beam acceleration means 3, and the guiding means 10. The grounding cover having a prescribed thickness is composed of a first grounding cover 7 covering the charged particle beam acceleration means 3; and a second grounding cover 8, detachment freely arranged on the first grounding cover 7, covering the plasma generation means 1, and having a wall thickness thinner than that of the first grounding cover 7. COPYRIGHT: (C)2006,JPO&NCIPI
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