| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow passage block structure having no residence part on a flow passage, capable of replacing gas in a short time. SOLUTION: A first flow passage block 6 is provided with a mounting hole 8, a process gas output flow passage 11, a first port 12, a process gas input flow passage 13, and a purge gas input flow passage 19. A purge valve input flow passage 19 is drilled toward the vicinity of a valve part of a supply valve 2 from a side face opposing to a second flow passage block 7 and is communicated with the process gas output flow passage 11. On the other hand, the second flow passage block 7 is provided with a mounting hole 20, a second port 21, a purge gas output flow passage 25, a purge valve output flow passage 24, a third port 27, and an output flow passage 26. The first and second flow passage blocks 6, 7 are mutually connected to communicate the purge gas input flow passage 19 with the purge valve output flow passage 24 and communicate the process gas output flow passage 11 with a common output flow passage 26 to constitute the flow passage block structure 5. COPYRIGHT: (C)2006,JPO&NCIPI
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